diff --git a/BaseTools/Source/Python/Common/Misc.py b/BaseTools/Source/Python/Common/Misc.py
index 15ae6a9e40..714eb840ea 100755
--- a/BaseTools/Source/Python/Common/Misc.py
+++ b/BaseTools/Source/Python/Common/Misc.py
@@ -492,13 +492,9 @@ def SaveFileOnChange(File, Content, IsBinaryFile=True, FileLock=None):
 
 
     if GlobalData.gIsWindows and not os.path.exists(File):
-        # write temp file, then rename the temp file to the real file
-        # to make sure the file be immediate saved to disk
-        with tempfile.NamedTemporaryFile(OpenMode, dir=os.path.dirname(File), delete=False) as tf:
-            tf.write(Content)
-            tempname = tf.name
         try:
-            os.rename(tempname, File)
+            with open(File, OpenMode) as tf:
+                tf.write(Content)
         except IOError as X:
             if GlobalData.gBinCacheSource:
                 EdkLogger.quiet("[cache error]:fails to save file with error: %s" % (X))
@@ -566,21 +562,8 @@ def CopyFileOnChange(SrcFile, Dst, FileLock=None):
     if FileLock:
         FileLock.acquire()
 
-    # os.replace and os.rename are the atomic operations in python 3 and 2.
-    # we use these two atomic operations to ensure the file copy is atomic:
-    # copy the src to a temp file in the dst same folder firstly, then
-    # replace or rename the temp file to the destination file.
-    with tempfile.NamedTemporaryFile(dir=DirName, delete=False) as tf:
-        CopyLong(SrcFile, tf.name)
-        tempname = tf.name
     try:
-        if hasattr(os, 'replace'):
-            os.replace(tempname, DstFile)
-        else:
-            # os.rename reqire to remove the dst on Windows, otherwise OSError will be raised.
-            if GlobalData.gIsWindows and os.path.exists(DstFile):
-                os.remove(DstFile)
-            os.rename(tempname, DstFile)
+        CopyLong(SrcFile, DstFile)
     except IOError as X:
         if GlobalData.gBinCacheSource:
             EdkLogger.quiet("[cache error]:fails to copy file with error: %s" % (X))